Publication:

Gas phase pore stuffing for the protection of organo-silicate glass dielectric materials

Date

2018

Proceedings Paper

Simple item page Full metadata Statistics

Files

41818.pdf 430.83 KB

Author(s)

Fujikawa, Makoto

;

de Marneffe, Jean-Francois

;

Chanson, Romain

;

Babaei Gavan, Khashayar

;

Rezvanov, Askar

;

Lazzarino, Frederic

;

;

;

;

Statistics

2012 since deposited on 2021-10-25

Acq. date: 2026-10-04