Browsing by author "Mesuda, Kei"
Now showing items 1-3 of 3
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Impact of alternative mask stacks on the imaging performance at NA 1.20 and above
Philipsen, Vicky; Mesuda, Kei; De Bisschop, Peter; Erdmann, Andreas; Citarella, Giuseppe; Evanschitzky, Peter; Birkner, Robert; Richter, Rigo; Scherübl, Thomas (2007) -
Mask transmission resonance in bi-layer masks
Philipsen, Vicky; De Bisschop, Peter; Mesuda, Kei (2008) -
Observation of negative mask error enhancement factor due to mask transmission resonance
Philipsen, Vicky; De Bisschop, Peter; Mesuda, Kei (2008)