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Conference contributions
Mask transmission resonance in bi-layer masks
Publication:
Mask transmission resonance in bi-layer masks
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Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Philipsen, Vicky
;
De Bisschop, Peter
;
Mesuda, Kei
Journal
Abstract
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1862
since deposited on 2021-10-17
Acq. date: 2026-01-08
Citations
Metrics
Views
1862
since deposited on 2021-10-17
Acq. date: 2026-01-08
Citations