Browsing by author "Detavernier, Chrostophe"

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Sealing of low-k dielectric (k=2.0) with self-assembled monolayers (SAMs) for the atomic layer deposition (ALD) of TiN

Sun, Yiting; Levrau, Elisabeth; Blauw, Michiel; Meersschaut, Johan; Verdonck, Patrick; Struyf, Herbert; Detavernier, Chrostophe; Baklanov, Mikhaïl; De Feyter, Steven; Armini, Silvia (2013)