Browsing by author "Yasui, Kenichi"

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Inverse lithography for 45-nm-node contact holes at 1.35 numerical aperture

Kempsell, Monica; Hendrickx, Eric; Tritchkov, Alexander; Sakajiri, Kyohei; Yasui, Kenichi; Yoshitake, Susuki; Granik, Yuri; Vandenberghe, Geert; Smith, Bruce W. (2009)