Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Articles
View item
imec Publications Repository
imec Publications
Articles
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Inverse lithography for 45-nm-node contact holes at 1.35 numerical aperture
View/
open
20291.pdf (1.127Mb)
Metadata
Show full item record
Authors
Kempsell, Monica
;
Hendrickx, Eric
;
Tritchkov, Alexander
;
Sakajiri, Kyohei
;
Yasui, Kenichi
;
Yoshitake, Susuki
;
Granik, Yuri
;
Vandenberghe, Geert
;
Smith, Bruce W.
Issue
4
Journal
Journal of Micro/Nanolithography, MEMS, and MOEMS
Volume
8
Title
Inverse lithography for 45-nm-node contact holes at 1.35 numerical aperture
Publication type
Journal article
Embargo date
9999-12-31
Collections
Articles
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login