Browsing by author "Ingolfsson, Oddur"
Now showing items 1-2 of 2
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Electron-induced fragmentation mechanisms in organic monomers and their implications for photoresist optimization for EUV lithography
Rathore, Ashish; Cipriani, Maicol; Huang, Ching-Chung; Amiaud, Lionel; Dablemont, Celine; Lafosse, Anne; Ingolfsson, Oddur; De Simone, Danilo; De Gendt, Stefan (2021) -
Extreme Ultraviolet-Printability and Mechanistic Studies of Engineered Hydrogen Silsesquioxane Photoresist Systems
Rathore, Ashish; Pollentier, Ivan; Cipriani, Maicol; Singh, Harpreet; De Simone, Danilo; Ingolfsson, Oddur; De Gendt, Stefan (2021)