Browsing by author "Servidori, M."
Now showing items 1-2 of 2
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Non-destructive techniques for identification and control of processing induced extended defects in silicon and correlation with device yield
Vanhellemont, Jan; Servidori, M.; Higgs, V.; Gramenova, Emilia; Simoen, Eddy; Jansen, Philippe (1996) -
Non-destructive techniques for identification and control of processing induced extended defects in silicon and correlation with device yield
Vanhellemont, Jan; Milita, S.; Servidori, M.; Higgs, V.; Kissinger, G.; Gramenova, Emilia; Simoen, Eddy; Jansen, Philippe (1997)