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Non-destructive techniques for identification and control of processing induced extended defects in silicon and correlation with device yield
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Non-destructive techniques for identification and control of processing induced extended defects in silicon and correlation with device yield
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Date
1996
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1591.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vanhellemont, Jan
;
Servidori, M.
;
Higgs, V.
;
Gramenova, Emilia
;
Simoen, Eddy
;
Jansen, Philippe
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1949
since deposited on 2021-09-29
1
last month
Acq. date: 2026-01-25
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Statistics
Views
1949
since deposited on 2021-09-29
1
last month
Acq. date: 2026-01-25
Citations