Authors

Vanhellemont, Jan; Servidori, M.; Higgs, V.; Gramenova, Emilia; Simoen, Eddy; Jansen, Philippe

Conference

International Conference on Extended Defects in Semiconductors - EDS

Title

Non-destructive techniques for identification and control of processing induced extended defects in silicon and correlation with device yield

Publication type

Oral presentation

Embargo date

9999-12-31