Browsing by author "Rohr, Erika"
Now showing items 41-42 of 42
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Ultra low-EOT (5 Å) gate-first and gate-last high performance CMOS achieved by gate-electrode optimization
Ragnarsson, Lars-Ake; Li, Zilan; Tseng, Joshua; Schram, Tom; Rohr, Erika; Cho, Moon Ju; Kauerauf, Thomas; Conard, Thierry; Okuno, Y.; Parvais, Bertrand; Absil, Philippe; Biesemans, Serge; Hoffmann, Thomas Y. (2009) -
Ultrathin EOT scaling of high-k/metal gate stacks
Ragnarsson, Lars-Ake; Cho, Moon Ju; Chiarella, Thomas; Mitard, Jerome; Schram, Tom; Rohr, Erika; Witters, Liesbeth; Togo, Mitsuhiro; Horiguchi, Naoto; Thean, Aaron (2011)