Browsing by author "Wang, Suping"

Now showing items 1-1 of 1

Evaluation of resist performance for 22nm half-pitch and beyond using EUV interference lithography

Langner, Andreas; Ekinci, Yasin; Gronheid, Roel; Wang, Suping; van Setten, Eelco; van Ingen-Schenau, Koen; Feenstra, Kees; Mallmann, Joerg; Maas, Raymond (2010)