Browsing by author "Kato, Takeshi"

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Impact of annealing temperature on DSA process: toward faster assembly kinetics

Suh, Hyo Seon; Nair, Vineet Vijayakrishnan; Rincon Delgadillo, Paulina; Doise, Jan; Lorusso, Gian; Nealey, Paul; Monreal, Victor; Baskaran, Durairaj; Cao, Yi; Padmanaban, Munirathna; Li, Jin; Kato, Takeshi; Sutani, Takumichi; Ishimoto, Toru; Ikota, Masami; Koshihara, Shunsuke (2018)
LCDU and placement improvement of contacts using EUV templated DSA

Boeckx, Carolien; Doise, Jan; Chan, BT; Lorusso, Gian; Sutani, Takumichi; Koshihara, Shunsuke; Ishimoto, Toru; Kato, Takeshi; Rincon Delgadillo, Paulina; De Gendt, Stefan (2018)