Browsing by author "Lefferts, S."
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Toward successful integration of gap-filling ultralow-k dielectrics
Zhang, Liping; de Marneffe, Jean-Francois; Lesniewska, Alicja; Verdonck, Patrick; Heylen, Nancy; Murdoch, Gayle; Croes, Kristof; Tokei, Zsolt; Boemmels, Juergen; Lefferts, S.; De Gendt, Stefan; Baklanov, Mikhaïl (2016)