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Toward successful integration of gap-filling ultralow-k dielectrics
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Authors
Zhang, Liping
;
de Marneffe, Jean-Francois
;
Lesniewska, Alicja
;
Verdonck, Patrick
;
Heylen, Nancy
;
Murdoch, Gayle
;
Croes, Kristof
;
Tokei, Zsolt
;
Boemmels, Juergen
;
Lefferts, S.
;
De Gendt, Stefan
;
Baklanov, Mikhaïl
Conference
IEEE International Interconnect Technology Conference / Advanced Metallization Conference - IITC/AMC
Title
Toward successful integration of gap-filling ultralow-k dielectrics
Publication type
Proceedings paper
Embargo date
9999-12-31
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