Publication:

Toward successful integration of gap-filling ultralow-k dielectrics

Date

2016

Proceedings Paper

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Files

33653.pdf 786.85 KB

Author(s)

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de Marneffe, Jean-Francois

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Lesniewska, Alicja

;

Verdonck, Patrick

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Boemmels, Juergen

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;

De Gendt, Stefan

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Baklanov, Mikhaïl

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Acq. date: 2026-04-05