Browsing by author "Moon, J. T."
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Effects of plasma chemistry on low-k film properties
Kim, Dongchan; Urbanowicz, Adam; Mannaert, Geert; Struyf, Herbert; Min, K. J.; Kang, C. J.; Moon, J. T.; Baklanov, Mikhaïl (2007)
Now showing items 1-1 of 1