Browsing by author "De Marco, Cinzia"

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Damage clustering and damage-size distributions after megasonic cleaning

De Marco, Cinzia; Wostyn, Kurt; Bearda, Twan; Sano, Ken-Ichi; Kenis, Karine; Janssens, Tom; Leunissen, Peter; Eitoku, Atsuro; Mertens, Paul (2007)
Damage review on gate stack test structures after high-velocity aerosol cleaning

Wostyn, Kurt; Sano, Ken-Ichi; De Marco, Cinzia; Kenis, Karine; Van Den Heuvel, Dieter; Janssens, Tom; Bearda, Twan; Leunissen, Peter; Mertens, Paul; Eitoku, Atsuro (2007)