Damage review on gate stack test structures after high-velocity aerosol cleaning

Thumbnail
Metadata
Show full item record
Authors
Wostyn, Kurt; Sano, Ken-Ichi; De Marco, Cinzia; Kenis, Karine; Van Den Heuvel, Dieter; Janssens, Tom; Bearda, Twan; Leunissen, Peter; Mertens, Paul; Eitoku, Atsuro
Conference
Sematech Surface Preparation and Cleaning Conference
Title
Damage review on gate stack test structures after high-velocity aerosol cleaning
Publication type
Proceedings paper
Collections