Publication:

Damage review on gate stack test structures after high-velocity aerosol cleaning

Date

2007
Proceedings Paper
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dc.contributor.authorWostyn, Kurt
dc.contributor.authorSano, Ken-Ichi
dc.contributor.authorDe Marco, Cinzia
dc.contributor.authorKenis, Karine
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorJanssens, Tom
dc.contributor.authorBearda, Twan
dc.contributor.authorLeunissen, Peter
dc.contributor.authorMertens, Paul
dc.contributor.authorEitoku, Atsuro
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorVan Den Heuvel, Dieter
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.date.accessioned2021-10-16T21:46:54Z
dc.date.available2021-10-16T21:46:54Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13233
dc.source.conferenceSematech Surface Preparation and Cleaning Conference
dc.source.conferencedate25/04/2007
dc.source.conferencelocationAustin, TX USA
dc.title

Damage review on gate stack test structures after high-velocity aerosol cleaning

dc.typeProceedings paper
dspace.entity.typePublication
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