Browsing by author "Karmarkar, Aditya P."

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Performance and reliability impact of copper plasticity in backside TSV-last fabrication process

Karmarkar, Aditya P.; Guo, Wei; Xu, Xiaopeng; Van der Plas, Geert; Van Huylenbroeck, Stefaan; Gonzalez, Mario; Absil, Philippe; El Sayed, Karim; Beyne, Eric (2016)