Authors

Karmarkar, Aditya P.; Guo, Wei; Xu, Xiaopeng; Van der Plas, Geert; Van Huylenbroeck, Stefaan; Gonzalez, Mario; Absil, Philippe; El Sayed, Karim; Beyne, Eric

ISSN

1530-4388

Issue

3

Journal

IEEE Transactions on Device and Materials Reliability

Volume

16

Title

Performance and reliability impact of copper plasticity in backside TSV-last fabrication process

Publication type

Journal article

Embargo date

9999-12-31