Browsing by author "Durant, Stephane"
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Defect source analysis of directed self-assembly process
Rincon Delgadillo, Paulina; Suri, Mayur; Durant, Stephane; Cross, Andrew; Nagaswami, Venkat; Van Den Heuvel, Dieter; Gronheid, Roel; Nealey, Paul (2013) -
Defect source analysis of directed self-assembly process (DSA of DSA)
Rincon Delgadillo, Paulina; Harukawa, Ryota; Suri, Mayur; Durant, Stephane; Cross, Andrew; Nagaswami, Venkat; Van Den Heuvel, Dieter; Gronheid, Roel; Nealey, Paul (2013) -
Inspection of directed self assembly defects
Ito, Chikashi; Durant, Stephane; Lange, Steve; Harukawa, Ryota; Miyagi, Takemasa; Nagaswami, Venkat; Rincon Delgadillo, Paulina; Gronheid, Roel; Nealey, Paul (2014)