Browsing by author "Gornev, E. S."
Now showing items 1-1 of 1
-
Area-selective grafting of siloxane molecules on low-k dielectric with respect to copper surface
Rezvanov, Askar; Zyulkov, Ivan; Gornev, E. S.; de Marneffe, Jean-Francois; Armini, Silvia (2018)