Authors

Rezvanov, Askar; Zyulkov, Ivan; Gornev, E. S.; de Marneffe, Jean-Francois; Armini, Silvia

Conference

Materials for Advanced Metallization Conference - MAM

Title

Area-selective grafting of siloxane molecules on low-k dielectric with respect to copper surface

Publication type

Meeting abstract

Embargo date

9999-12-31