Browsing by author "Huet, K."

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3D sequential low temperature top tier devices using dopant activation with excimer laser anneal and strained silicon as performance boosters

Vandooren, Anne; Wu, Zhicheng; Parihar, Narendra; Franco, Jacopo; Parvais, Bertrand; Matagne, Philippe; Debruyn, Haroen; Mannaert, Geert; Devriendt, Katia; Teugels, Lieve; Vecchio, Emma; Radisic, Dunja; Rosseel, Erik; Hikavyy, Andriy; Chan, BT; Waldron, Niamh; Mitard, Jerome; Besnard, G.; Alvarez, A.; Gaudin, G.; Schwarzenbach, W.; Radu, I.; Nguyen, B. Y.; Huet, K.; Tabata, T.; Mazzamuto, F.; Demuynck, Steven; Boemmels, Juergen; Collaert, Nadine; Horiguchi, Naoto (2020)
Nickel silicide formation using excimer laser annealing

Tous, Loic; Lerat, Jean-Francois; Emeraud, Thierry; Negru, R.; Huet, K.; Uruena De Castro, Angel; Aleman, Monica; Russell, Richard; John, Joachim; Poortmans, Jef; Mertens, Robert (2012)