Browsing by author "McGeary, M. J."

Now showing items 1-4 of 4

    • Effect of Cl in gate oxidation 

      Mertens, Paul; McGeary, M. J.; Schaekers, Marc; Sprey, Hessel; Vermeire, Bert; Depas, Michel; Meuris, Marc; Heyns, Marc (1997)

    • Effect of Cl in gate oxidation 

      Mertens, Paul; McGeary, M. J.; Schaekers, Marc; Sprey, Hessel; Vermeire, Bert; Depas, Michel; Meuris, Marc; Heyns, Marc (1997)

    • Environmentally-friendly chlorine during oxidation 

      Mertens, Paul; Vermeire, Bert; McGeary, M. J.; Meuris, Marc; Heyns, Marc; Depas, Michel; Sees, J.; O'Brien, S. C.; Gräf, D. (1995)

    • Just-Clean- Enough technology for the 21st century 

      Heyns, Marc; Meuris, Marc; Mertens, Paul; Hurd, Trace; Schmidt, Harald; Depas, Michel; Rotondaro, Antonio; Vermeire, Bert; Vandervorst, Wilfried; Storm, Wolfgang; Polleunis, C.; Bertrand, P.; McGeary, M. J.; Lubbers, A.; Hatcher, Z. (1995)