Publication:

Effect of Cl in gate oxidation

Date

1997
Proceedings Paper
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1994.pdf 609.31 KB

Author(s)

Mertens, Paul  
;
McGeary, M. J.
;
Schaekers, Marc  
;
Sprey, Hessel  
;
Vermeire, Bert
;
Depas, Michel
;
Meuris, Marc  
;
Heyns, Marc  

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1955 since deposited on 2021-09-30
Acq. date: 2026-09-01

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1955 since deposited on 2021-09-30
Acq. date: 2026-09-01

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