Effect of Cl in gate oxidation

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Authors
Mertens, Paul; McGeary, M. J.; Schaekers, Marc; Sprey, Hessel; Vermeire, Bert; Depas, Michel; Meuris, Marc; Heyns, Marc
Conference
Materials Reliability in Microelectronics VII
Title
Effect of Cl in gate oxidation
Publication type
Proceedings paper
Embargo date
9999-12-31
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