Browsing by author "O Neill, A.G."

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Study of the effect of dielectric porosity on the stress in advanced Cu/low-k interconnects using x-ray diffraction

Wilson, Chris; Zhao, Chao; Zhao, Larry; Metzger, T.H.; Tokei, Zsolt; Croes, Kristof; Pantouvaki, Marianna; Beyer, Gerald; Horsfall, A.B.; O Neill, A.G. (2009)