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Study of the effect of dielectric porosity on the stress in advanced Cu/low-k interconnects using x-ray diffraction
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1970 since deposited on 2021-10-18
3last month
Acq. date: 2026-08-17
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Statistics
Views
1970 since deposited on 2021-10-18
3last month
Acq. date: 2026-08-17
Citations