Browsing by author "Van Hove, Robbert"

Now showing items 1-1 of 1

In situ monitoring of atomic layer deposition in nanoporous thin films using ellipsometric porosimetry

Dendooven, Jolien; Devloo-Casier, Kilian; Levrau, Elisabeth; Van Hove, Robbert; Pulinthanathu Sree, Sreeprasanth; Baklanov, Mikhaïl; Martens, Johan; Detavernier, Christophe (2012)