Authors

Dendooven, Jolien; Devloo-Casier, Kilian; Levrau, Elisabeth; Van Hove, Robbert; Pulinthanathu Sree, Sreeprasanth; Baklanov, Mikhaïl; Martens, Johan; Detavernier, Christophe

ISSN

0743-7463

Issue

8

Journal

Langmuir

Volume

28

Title

In situ monitoring of atomic layer deposition in nanoporous thin films using ellipsometric porosimetry

Publication type

Journal article

Embargo date

9999-12-31