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In situ monitoring of atomic layer deposition in nanoporous thin films using ellipsometric porosimetry
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1901 since deposited on 2021-10-20
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Acq. date: 2025-10-24
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Views
1901 since deposited on 2021-10-20
429item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations