Browsing by author "Selinger, T."

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Integration of ultra shallow junctions in PVD TaN nMOS transistors with flash lamp annealing

Severi, Simone; De Meyer, Kristin; Pawlak, Bartek; Duffy, Ray; Kerner, Christoph; McCoy, S.; Gelpey, J.; Selinger, T.; Ragnarsson, Lars-Ake; Absil, Philippe; Biesemans, Serge (2005-10)