Authors

Severi, Simone; De Meyer, Kristin; Pawlak, Bartek; Duffy, Ray; Kerner, Christoph; McCoy, S.; Gelpey, J.; Selinger, T.; Ragnarsson, Lars-Ake; Absil, Philippe; Biesemans, Serge

Conference

Extended Abstracts International Conference on Solid State Devices and Materials - SSDM

Title

Integration of ultra shallow junctions in PVD TaN nMOS transistors with flash lamp annealing

Publication type

Proceedings paper