Publication:

Integration of ultra shallow junctions in PVD TaN nMOS transistors with flash lamp annealing

Date

2005-10
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorSeveri, Simone
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorPawlak, Bartek
dc.contributor.authorDuffy, Ray
dc.contributor.authorKerner, Christoph
dc.contributor.authorMcCoy, S.
dc.contributor.authorGelpey, J.
dc.contributor.authorSelinger, T.
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBiesemans, Serge
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorKerner, Christoph
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.date.accessioned2021-10-16T04:58:21Z
dc.date.available2021-10-16T04:58:21Z
dc.date.issued2005-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11188
dc.source.beginpage910
dc.source.conferenceExtended Abstracts International Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate13/09/2005
dc.source.conferencelocationKobe Japan
dc.source.endpage911
dc.title

Integration of ultra shallow junctions in PVD TaN nMOS transistors with flash lamp annealing

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions