Publication:
Integration of ultra shallow junctions in PVD TaN nMOS transistors with flash lamp annealing
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1922 since deposited on 2021-10-16
7last month
Acq. date: 2026-05-16
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Statistics
Views
1922 since deposited on 2021-10-16
7last month
Acq. date: 2026-05-16
Citations