Publication:
Integration of ultra shallow junctions in PVD TaN nMOS transistors with flash lamp annealing
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1913 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08
Citations
Metrics
Views
1913 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08
Citations