Browsing by author "Schlatmann, Bart"

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11-Megapixel CMOS-integrated SiGe micromirror arrays for high-end applications

Witvrouw, Ann; Haspeslagh, Luc; Varela Pedreira, Olalla; De Coster, Jeroen; De Wolf, Ingrid; Tilmans, Harrie; Bearda, Twan; Schlatmann, Bart; van Bommel, Mark; de Nooijer, Christine; Magnee, P.H.C.; Lous, E.J.; Hagting, Marco; Lauria, John; Vanneer, Roel; van Drieenhuizen, Bert (2010)
Packaging of 11MPixel CMOS-integrated SiGe micro-mirror arrays

Witvrouw, Ann; Tilmans, Harrie; Bogaerts, Lieve; De Moor, Piet; Bearda, Twan; Halder, Sandip; Haspeslagh, Luc; Schlatmann, Bart; van Bommel, Mark; de Nooijer, Christine; Lauria, John; Vanneer, Roel; van Drieenhuizen, Bert (2009)
SLM device for 193 nm lithographic applications

Lauria, John; Albright, Ronald; Vladimirsky, Olga; Chen, Luoqi; Hoeks, Maarten; Vanneer, Roel; van Drieënhuizen, Bert; Haspeslagh, Luc; Witvrouw, Ann; Schlatmann, Bart (2008)