Publication:

11-Megapixel CMOS-integrated SiGe micromirror arrays for high-end applications

Date

2010
Journal article
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Author(s)

Witvrouw, Ann
;
Haspeslagh, Luc  
;
Varela Pedreira, Olalla  
;
De Coster, Jeroen  
;
De Wolf, Ingrid  
;
Tilmans, Harrie  
;
Bearda, Twan
;
Schlatmann, Bart
;
van Bommel, Mark
;
de Nooijer, Christine  
;
Magnee, P.H.C.
;
Lous, E.J.
;
Hagting, Marco
;
Lauria, John
;
Vanneer, Roel
;
van Drieenhuizen, Bert

Journal

Journal of Microelectromechanical Systems

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