11-Megapixel CMOS-integrated SiGe micromirror arrays for high-end applications

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Authors

Witvrouw, Ann; Haspeslagh, Luc; Varela Pedreira, Olalla; De Coster, Jeroen; De Wolf, Ingrid; Tilmans, Harrie; Bearda, Twan; Schlatmann, Bart; van Bommel, Mark; de Nooijer, Christine; Magnee, P.H.C.; Lous, E.J.; Hagting, Marco; Lauria, John; Vanneer, Roel; van Drieenhuizen, Bert

ISSN

1057-7157

Issue

1

Journal

Journal of Microelectromechanical Systems

Volume

19

Title

11-Megapixel CMOS-integrated SiGe micromirror arrays for high-end applications

Publication type

Journal article

Embargo date

9999-12-31

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