Browsing by author "Hautala, J."

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Evaluation of gas cluster ion beam processing for sealing af a porous dielectric

Brongersma, Sywert; Sherman, S.; Tabat, M.; Patz, Michael; Beyer, Gerald; Travaly, Youssef; Le, Quoc Toan; Caluwaerts, Rudy; Hautala, J. (2005-01)