Evaluation of gas cluster ion beam processing for sealing af a porous dielectric

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Authors
Brongersma, Sywert; Sherman, S.; Tabat, M.; Patz, Michael; Beyer, Gerald; Travaly, Youssef; Le, Quoc Toan; Caluwaerts, Rudy; Hautala, J.
Conference
Advanced Metallization Conference 2004
Title
Evaluation of gas cluster ion beam processing for sealing af a porous dielectric
Publication type
Proceedings paper
Embargo date
9999-12-31
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