Browsing by author "Wang, Shouxu"
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Hydroquinone oriented growth control to achieve high-quality copper coating at high rate for electronics interconnection
Zheng, Li; Wang, C.; Cai, D.; Huang, Y.; Adi, K.; Hong, Y.; Chen, Y.; Zhou, G.; Armini, Silvia; De Gendt, Stefan; Wang, Shouxu; He, Wei (2020)