Browsing by author "Franke, Joern-Holger"
Now showing items 21-22 of 22
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Towards high NA patterning readiness: Materials, processes and etch transfer for P24 Line Space
Santaclara, J. G.; Maslow, M. J.; Thiam, Arame; Franke, Joern-Holger; Schleicher, Filip; Blanc, Romuald; Bezard, Philippe; Moussa, Alain; Hendrickx, Eric; Wong, Patrick (2021) -
Validation of imaging benefits of Dual Monopole exposures
Brunner, Timothy A.; Franke, Joern-Holger; Truffert, Vincent; De Bisschop, Peter; Rispens, Gijsbert; Duriau, Edouard; van Dijk, Andre; Tabery, Cyrus; Rio, David; de Poortere, Etienne; van de Kerkhof, Mark; Hendrickx, Eric (2023)