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    • Determination of optical constants of thin films in the EUV 

      Ciesielski, Richard; Saadeh, Qais; Philipsen, Vicky; Opsomer, Karl; Soulie, Jean-Philippe; Wu, Meiyi; Naujok, Philipp; van de Kruijs, Robbert W. E.; Detavernier, Christophe; Kolbe, Michael; Scholze, Frank; Soltwisch, Victor (2022)