Browsing imec Publications by imec author "4f2134fbffe1740a5cb83d31911108e62adad6d9"
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Effect of inductively coupled electro-magnetic field on bottom oxide etch in a high aspect ratio trench
Sardo, Stefano; Palombizio, Antonio; Redolfi, Augusto; Mannarino, Manuel; Haspeslagh, Luc (2020) -
Effect of inductively coupled electro-magnetic field on bottom oxide etch in a high aspect ratio trench
Sardo, Stefano; Palombizio, Antonio; Redolfi, Augusto; Mannarino, Manuel (2020)