Browsing imec Publications by author "Ablett, J."
Now showing items 1-1 of 1
-
Study of chemical vapor deposition of manganese on porous SiCOH low-k dielectrics using Bis(ethylcyclopentadienyl)manganese
Jourdan, Nicolas; Krishtab, Mikhail; Baklanov, Mikhaïl; Meersschaut, Johan; Wilson, Chris; Ablett, J.; Fonda, E.; Zhao, Larry; Van Elshocht, Sven; Tokei, Zsolt; Vancoille, Eric (2012)