Authors

Jourdan, Nicolas; Krishtab, Mikhail; Baklanov, Mikhaïl; Meersschaut, Johan; Wilson, Chris; Ablett, J.; Fonda, E.; Zhao, Larry; Van Elshocht, Sven; Tokei, Zsolt; Vancoille, Eric

ISSN

1099-0062

Issue

5

Journal

Electrochemical and Solid-State Letters

Volume

15

Title

Study of chemical vapor deposition of manganese on porous SiCOH low-k dielectrics using Bis(ethylcyclopentadienyl)manganese

Publication type

Journal article

Embargo date

9999-12-31