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Study of chemical vapor deposition of manganese on porous SiCOH low-k dielectrics using Bis(ethylcyclopentadienyl)manganese

Date

2012
Journal article
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dc.contributor.authorJourdan, Nicolas
dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorWilson, Chris
dc.contributor.authorAblett, J.
dc.contributor.authorFonda, E.
dc.contributor.authorZhao, Larry
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVancoille, Eric
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVancoille, Eric
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-20T11:57:55Z
dc.date.available2021-10-20T11:57:55Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.issn1099-0062
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20880
dc.source.beginpageH176
dc.source.endpageH178
dc.source.issue5
dc.source.journalElectrochemical and Solid-State Letters
dc.source.volume15
dc.title

Study of chemical vapor deposition of manganese on porous SiCOH low-k dielectrics using Bis(ethylcyclopentadienyl)manganese

dc.typeJournal article
dspace.entity.typePublication
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