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Study of chemical vapor deposition of manganese on porous SiCOH low-k dielectrics using Bis(ethylcyclopentadienyl)manganese
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1912 since deposited on 2021-10-20
Acq. date: 2026-02-26
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1912 since deposited on 2021-10-20
Acq. date: 2026-02-26
Citations