Browsing imec Publications by author "Machida, Kohei"
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Reaction mechanisms of Sn-complex-side-chain polymer used for extreme ultraviolet lithography, studied by electron pulse radiolysis and & gamma;-radiolysis
Takata, Yui; Muroya, Yusa; Kozawa, Takahiro; Machida, Kohei; Enomoto, Satoshi; Naqvi, Bilal; De Simone, Danilo (2023)