Browsing imec Publications by author "Maciel, Homero"

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Investigations of capacitively-coupled plasmas by electrostatic probe technique

Cirino, Giuseppe; Castro, Raul; Pisani, Marcelo; Verdonck, Patrick; Mansano, Ronaldo; Massi, Marcos; Pessoa, Rodrigo; Barea, Luis; Brahim, Tayeb; Maciel, Homero (2015)